1995
DOI: 10.1051/jphyscol:1995584
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Properties of Surface Layers Produced from a Metalorganic Titanium Compound Under Glow Discharge Conditions

Abstract: A prospective line in the development of thermo-chemical treatments under glow discharge conditions is to work out new techniques of producing multicomponent layers, e.g., composite layers, by combining various treatments, such as e.g. plasma nitriding and the PACVD method. The combined properties, appropriately selected and complementary to one another, of the single-component layers obtained using one of these processes, permit widening the application range of the layers. The paper specifies the conditions … Show more

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