2022
DOI: 10.1364/oe.469851
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Pseudo Wigner-Ville distribution for 3D white light scanning interferometric measurement

Abstract: White light scanning interferometry is a commonly used optical measurement method for three-dimensional (3D) surface profiles. In the case of large phase errors, accurate height values can generally be obtained indirectly from the interferometric signal envelope information derived using various envelope extraction methods. However, the current envelope extraction algorithms have the disadvantages of low robustness, increasing the half-width of the envelope information, and requiring correct parameter settings… Show more

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Cited by 6 publications
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