2016
DOI: 10.1364/ao.55.004596
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Ptychography for optical metrology with limited translation knowledge

Abstract: We introduce unknown-transverse translation diversity phase retrieval: a ptychographic algorithm for optical metrology when a subaperture is translating through a plane conjugate to the exit pupil in a very poorly known fashion. The algorithm estimates the direction of translation and the distance traveled by the subaperture from one point spread function (PSF) to the next. It also estimates unknown point target motion and rotations of the subaperture between PSF acquisitions from the PSF data.

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Cited by 14 publications
(4 citation statements)
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“…Only when the image plane coincides perfectly with the aperture plane is the specimen reconstruction in focus, otherwise a computational propagation is needed after the reconstruction to bring the specimen to focus. Because this setup compresses the specimen information into a 2D complex wave, it is very useful when the 3D scattering inside the specimen renders the multiplicative approximation on which the other methods rely inaccurate – an example of this is optical metrology for contact lenses or optics characterisation (Moore & Fienup, ).…”
Section: Discussionmentioning
confidence: 99%
“…Only when the image plane coincides perfectly with the aperture plane is the specimen reconstruction in focus, otherwise a computational propagation is needed after the reconstruction to bring the specimen to focus. Because this setup compresses the specimen information into a 2D complex wave, it is very useful when the 3D scattering inside the specimen renders the multiplicative approximation on which the other methods rely inaccurate – an example of this is optical metrology for contact lenses or optics characterisation (Moore & Fienup, ).…”
Section: Discussionmentioning
confidence: 99%
“…and J.R.F.) extended the TTD method with a bootstrapping approach [35][36] . This method allows the bounding aperture, the linear phase contributing to each PSF, and details of the movement of the subaperture between images to be determined during wavefront-sensing analysis of the image data.…”
Section: Nircam Coronagraphic Module Wavefront-error Trendingmentioning
confidence: 99%
“…Ptychography, a promising coherent diffractive imaging technique, has been extensively investigated in disciplines as diverse as microscopy [1][2][3], three-dimensional imaging [4], and optical metrology [5,6]. Recently, ptychography-based optical security has aroused keen interest in researchers [7][8][9].…”
Section: Introductionmentioning
confidence: 99%