Pulsed Laser Machining Implemented with Piezoelectric Actuator

Abstract

This article introduces two scanner devices, which were used to study the possibilities of applying small vibratory motion in pulse laser machining. Small and fast oscillating motion is used in this research to decrease the pulse overlap of the pulsed fiber laser. When pulse overlap comes smaller the machining properties of the beam improve, because the previously vaporized metal does not cause power loss in the machining. Piezoelectric actuators have not been used much in certain scanner solutions, but they meet the speed and accuracy demands of many applications. This is mainly because the achievable work areas are small. Piezoelectric tip/tilt-mirror actuators that are commercially available have small scan angles when compared to galvanometer-based scanners. This research objective is to achieve better machining quality and to improve productivity.

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

“…Movable mirrors with a wide scanning range are expected to have a wide range of applications, such as for use in laser scanners for projective displays [1][2][3][4], laser radar [5][6][7], optical communications [8,9], and laser machining [10,11]. Numerous scanners use a resonant drive as a simple method to increase the scanning angle amplitude, a fact which has been introduced in many papers.…”

Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation

“…Laser scanners, which are realized by maneuvering a movable mirror using an actuator, are expected to have a wide range of applications, including displays [ 1 , 2 , 3 , 4 ], laser radars [ 5 , 6 , 7 ], optical communications [ 8 , 9 ], and laser processing [ 10 , 11 ]. A wide scanning range is desirable in all these applications.…”