Pulsed Power Electromigration in Copper Metallization (10 Hz – 4 MHz)

Mattoo, Mueen; Lloyd, J. R.

doi:10.1109/iirw59383.2023.10477695

2023 IEEE International Integrated Reliability Workshop (IIRW) 2023

DOI: 10.1109/iirw59383.2023.10477695

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Pulsed Power Electromigration in Copper Metallization (10 Hz – 4 MHz)

Mueen Mattoo,

J. R. Lloyd

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Pulsed Power Electromigration in Copper Metallization (10 Hz – 4 MHz)

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References 11 publications

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