Pyroelectric Thin Films Integrated with CCD

Abstract

We report on fabrication and characterization of three types of pyroelectric thin films: PbZr 0.53 Ti 0.47 O 3 and BaTiO 3 ceramics, PVDF, and polycyclic organic compound (TADPh). A theoretical model of uncooled focal plane array (UFPA) based on pyroelectric thin film integrated with CCD is proposed. The model of UFPA was designed around the heat balance equations and equivalent circuit. A modified technology of integrated structures of multi-element pyroelectric detectors and special-purpose CCD is proposed. There are designer and manufactured a completely monolithic 100 × 100 µm 2 pyroelectric sensor array based on a heat-sensitive film construction lifted slightly above the crystal and also detector specimens with NETD less than 0.2 K (8-12 µm at 300 K and 20 Hz). Derived measurements and investigations allowed us to choose the structure of 2D analogue CCD processor integrated with pyroelectric membrane array.