PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

“…Various MEMS devices have been demonstrated by using piezoelectric PZT film actuators. These piezoelectric PZT MEMS devices include atomic force microscope (AFM) cantilevers [7], [8] and cantilever sensors [9], micromirrors [10], [11], ultrasonic proximity sensors [12], accelerometers [13], RF MEMS switches [14], energy harvesters [15], [16], etc. In the optical MEMS field, features of large mirror size, large deflection angle, and smaller driving voltage are strongly demanded by applications like optical scanning display, 2-D optical switch, and variable optical attenuator (VOA).…”

MEMS Based Structurally Tunable Metamaterials at Terahertz Frequencies

“…For these initial proof-of-principle measurements, RTA was used to lock the SRRs into a set orientation which facilitated the electromagnetic characterization using THz-TDS. However, it will be possible to actively reorient the SRRs using welldeveloped micro/nano actuation techniques which include thermal resistive, piezoelectric, and electrostatic actuation [30][31][32]. The structural reconfiguration time can be on the order of milliseconds given the mechanical and thermal response times of the cantilevers.…”

Multi-dofs MEMS displacement sensors based on the Stewart platform theory

“…The motion control can improve the performances of both simple stages with 2 degrees of freedom (dofs) (typically 2 translations or 2 rotations) (Yee et al 2001;Choi et al 2001) and complicated stages with up to 6 dofs; an example of positioner with three translational directions and three rotational angles was described by Zhang et al (2005).…”