QEPAS Spectroscopy with fully tunable IC-ECDL with high bandwidth for the MIR range

Abstract

To meet the requirements for multi-species gas analysis, Quartz-Enhanced Photo-Acoustic Spectroscopy (QEPAS) is used in combination with an IC-based External Cavity Laser system (IC-ECL). The laser system allows the coverage of a wavelength range of 285 nm with an output power of several mW. By integrating piezoelectric actuators as well as resonantly driven MEMS actuators, extremely high sampling rates can be achieved. In this work, results on the detection of multiple trace gases by sequential quasi-simultaneous measurements are presented. The requirements of multi-species detection, output power, tuning range and detection rate are met by our work.