“…However, the concentration of middle-sized fragments in the active volume of the discharge during plasma deposition of AMA (C 3 H 5 þ and C 4 H 5 O þ ) and PiB (C 3 H 7 þ and C 4 H 7 O þ ) both tended to decrease. In literature, the chemical analysis of thin plasma films based on FTIR, XPS, [15,16] solid state 13 C NMR, [17] optical emission spectroscopy (OES), [18] electron spin resonance spectroscopy (ESR), [19,20] mass spectrometry, [21] and secondary ion mass spectroscopy (SIMS) [22][23][24] is predominant.…”