Quantitative elastic peak electron spectroscopy

Abstract

New quantitative method of hydrogen isotopes detection in engineering materials used for fusion is introduced. The study proposes a theory of small-angle atomic particle elastic reflection from multicomponent materials. A method for interpreting Elastic Peak Electron Spectroscopy signals considering the multiple scattering effect was developed. It is shown that ignoring the multiple scattering effect results in significant errors with quantitative evaluation of Elastic Peak Electron Spectroscopy signals.