“…Previous attempts to quantify nonimaging SIMS data have been pursued by one of two general methods: the application of theoretical ionization models such as the local thermal equilibrium (LTE) model originated by Andersen and Hinthorne ( 16) or empirical methods such as the use of relative sensitivity factors (17). Several attempts to quantify ion images using theoretical models have been reported by using LTE correction (18), sensitivity factor correction (17), total current monitoring (19), and application of simple correction factors (20).…”