Radiofrequency spark source mass spectrometric analysis of oxygen in undoped silicon crystals and of carbon in undoped and carbon doped gallium arsenide crystals

Wiedemann, B.; Bethge, Κ.; Schütze, W.; Lambert, U.; Pahlke, S.; Reinhold, Th.; Weinert, B.; Flade, T.

doi:10.1007/bf00322489

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Radiofrequency spark source mass spectrometric analysis of oxygen in undoped silicon crystals and of carbon in undoped and carbon doped gallium arsenide crystals

Cited by 6 publications

References 5 publications

Mass Spectrometry in Semiconductor Research

Mass Spectrometry in Semiconductor Research

Analysis of GaAs using a combined r.f. glow discharge and inductively coupled plasma source mass spectrometer

Inorganic trace analysis by mass spectrometry

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