Ranking routes in semiconductor wafer fabs

Abstract

We develop a method to estimate the quality of processing routes in a wafer fabrication process. Ranking such routes can be useful for identifying the “best” and “worst” routes when making adjustments to recipes. Route categorization is also useful in developing efficient scheduling algorithms. In particular, we propose a method for ranking routes based on count-based metrics such as the number of defects on a wafer. We start with a statistical model to produce a “local” ranking of a tool and then build a “global” ranking via a heuristic procedure. Creating a fully statistical procedure for ranking routes in semiconductor fabrication plants is virtually impossible, given the number of possible routes and the limited data available. Nonetheless, our discussions with working engineers indicate that even approximate rankings are useful for making better operational decisions.