2007
DOI: 10.1088/0960-1317/17/2/020
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Rapid prototyping of microfluidic chips in COC

Abstract: We present a novel, cost-efficient process chain for fast tooling and small-lot replication of high-quality, multi-scale microfluidic polymer chips within less than 5 days. The fabrication chain starts with a primary master which is made by well-established cleanroom processes such as DRIE or negative SU-8 resist based surface micromachining. The formation of undercuts in the master which would complicate demolding is carefully avoided. Secondary PDMS masters or epoxy-based masters which are more suitable for … Show more

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Cited by 177 publications
(148 citation statements)
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“…In the end, we could build microfluidic chips completely made out of COC, with a total thickness of about 200 to 300 µm, depending on the channel dimension. Hence, the X-ray beam is only passing through a layer of about 100 µm, which is about 5 to 20× thinner than what was previously published [246,247]. …”
Section: D2 Topas Microfluidic Devices For Saxs Flow Measurementsmentioning
confidence: 69%
“…In the end, we could build microfluidic chips completely made out of COC, with a total thickness of about 200 to 300 µm, depending on the channel dimension. Hence, the X-ray beam is only passing through a layer of about 100 µm, which is about 5 to 20× thinner than what was previously published [246,247]. …”
Section: D2 Topas Microfluidic Devices For Saxs Flow Measurementsmentioning
confidence: 69%
“…The COC plates and the microchips were fabricated through easily operational and inexpensive hot-embossing technique reported previously (Tsao and DeVoe 2009;Steigert et al 2007;Pu et al 2007). The inner surface of microchannel was modified by photographting (Mair et al 2006;Bedair and Oleschuk 2006;Rohr et al 2003;Samuel et al 2010).…”
Section: Resultsmentioning
confidence: 99%
“…Standard protocols for disc fabrication, polydimethylsiloxane priming, blood processing and cell culture were used and have been described elsewhere [33][34][35][36][37] . These protocols are also briefly outlined in the Supplementary Information.…”
Section: Methodsmentioning
confidence: 99%