“…On the other hand, treating micromachined substrates with plasticizers such as cyclohexane, chloroform and acetone can effectively reduce their surface roughness [ 114 , 115 ]. Ahmed et al found that steam treatment with chloroform for 30 s reduced the surface roughness of PMMA-based chips machined by micro-milling and smoothed them to a roughness of about 39 nm [ 116 ].…”