Real-time quality estimation to enable process evaluation in integrated circuit development

Häusler, Stefan; Poppen, Frank; Hahn, Axel

doi:10.1109/iemce.2008.4617979

2008 IEEE International Engineering Management Conference 2008

DOI: 10.1109/iemce.2008.4617979

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Real-time quality estimation to enable process evaluation in integrated circuit development

Stefan Häusler

Frank Poppen

Axel Hahn

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Real-time quality estimation to enable process evaluation in integrated circuit development

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References 22 publications

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