Recent Advances in Bio-MEMS and Future Possibilities: An Overview

Pandey, Yudhishthir; Singh, Surya Prakash

doi:10.1007/s40031-023-00924-w

Cited by 4 publications

(2 citation statements)

References 93 publications

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“…According to Figure 6, a typical photolithography consists of a pattern transfer from a mask during a single exposure step to a photoresistive material. Nevertheless, the use of toxic or dangerous materials together with special ambient conditions restricts the adaption of lithographic fabrication methods and triggers the development of alternative miniaturization technologies and advanced materials [52,53].…”

Section: Photolithographymentioning

confidence: 99%

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Torkashvand,

Shayeganfar,

Ramazani

2024

Micromachines

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The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.

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Section: Photolithographymentioning

confidence: 99%

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Torkashvand,

Shayeganfar,

Ramazani

2024

Micromachines

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“…Outside of electroacoustic devices, lumped element models and electrical equivalent circuits have been used for the design of gyroscopes [129] comb-drive actuator [130], wake-up switch [97], accelerometers [131] and multiple other devices. Recent trends including bio-MEMS [132], membrane based NEMS and MEMS biosensors [133], microactuators for biomedical applications [134], biomechanical energy harvesting [135] and Micro-Opto-Electro-Mechanical Systems (MOEMS) [136] could also take advantages from the efficiency of lumped element modelling as a design tool.…”

Section: Perspectivesmentioning

confidence: 99%

Equivalent electrical circuits for electroacoustic MEMS design: a review

Liechti

2024

J. Micromech. Microeng.

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At the era of powerful computers, it’s tempting to employ finite element models early in the design phase of a device. However, especially for MEMS devices, the dimensional ratios and short wavelengths compared to the device’s dimensions, along with the involvement of multiple physics, can necessitate complex and computationally intensive models, making them impractical for optimization processes. Hence, reduced order models, like the lumped element model, are often preferred as they accurately represent complex system behavior within a defined frequency range. This review explores the use of lumped element models and their corresponding electrical equivalent circuits for simulating MEMS electro-acoustic devices, offering insights into their diverse applications within this specific domain.

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Simulation study of a planar quadrupole mass filter for MEMS mass spectrometer

CHENG,

SHEN,

et al. 2024

Chinese Journal of Analytical Chemistry

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Recent Advances in Bio-MEMS and Future Possibilities: An Overview

Cited by 4 publications

References 93 publications

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Equivalent electrical circuits for electroacoustic MEMS design: a review

Simulation study of a planar quadrupole mass filter for MEMS mass spectrometer

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