Recent Progress in Solid‐State Nanopores

Abstract

The solid-state nanopore has attracted much attention as a next-generation DNA sequencing tool or a single-molecule biosensor platform with its high sensitivity of biomolecule detection. The platform has advantages of processability, robustness of the device, and flexibility in the nanopore dimensions as compared with the protein nanopore, but with the limitation of insufficient spatial and temporal resolution to be utilized in DNA sequencing. Here, the fundamental principles of the solid-state nanopore are summarized to illustrate the novelty of the device, and improvements in the performance of the platform in terms of device fabrication are explained. The efforts to reduce the electrical noise of solid-state nanopore devices, and thus to enhance the sensitivity of detection, are presented along with detailed descriptions of the noise properties of the solid-state nanopore. Applications of 2D materials including graphene, h-BN, and MoS as a nanopore membrane to enhance the spatial resolution of nanopore detection, and organic coatings on the nanopore membranes for the addition of chemical functionality to the nanopore are summarized. Finally, the recently reported applications of the solid-state nanopore are categorized and described according to the target biomolecules: DNA-bound proteins, modified DNA structures, proteins, and protein oligomers.

Direct electrophoretic microRNA preparation from clinical samples using nanofilter membrane

“…Consequently, to create a thin and robust nanoporous membrane, silicon nitride was selected as the membrane material and thus semiconductor fabrication technique as the device fabrication method. From its excellent mechanical robustness and chemical stability, SiN x thin film has been widely used in solid-state nanopore fabrication [34,35]. The semiconductor fabrication technology, lithography in particular, has a strong advantage in forming a highly aligned structure with designed feature size [36,37].…”

“…This allowed the fabrication of a packed, orderly network of identical pores. Figure 2 illustrated the fabrication procedure of the nanofilter membrane device with the images of the completed devices and the porous membrane [32,34,35,38,39]. Figure 2a presented the nanofilter membrane fabrication sequence, explained in detail in the experimental section.…”

Dynamic Luminescent Biosensors Based on Peptides for Oxygen Determination

“…Biosensors based on time-resolved fluorescence are promising because they are able to promote improvements on selectivity, specificity, and sensibility, becoming ultrasensitives, capable of determining minimal local variations of the analyte concentration, and can be combined to several other analytical techniques. In this context, there are the nanopores, which are highly sensitive biosensors, able to detect the analyte at the range of nanomolar of concentration, due to their characteristic structure of a nanometer scale pore that is similar to the size of the target molecule, enabling a single-molecule analysis [3].…”

Application of Solid-State Nanopore in Protein Detection

“…Li et al reported DNA sensing using solid-state nanopores for the first time, with a 5-nm diameter pore [25]. A systematical overview of solid-state nanopores is summarized in reviews by Lee et al [28] and Gonzalo et al [29]. Solid-state nanopores can be fabricated by focused ion beam (FIB) [25], electron-beam drilling (EBD) [26], controlled dielectric breakdown (CDB) [27,30], and so on.…”