Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles

Abstract

Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moiré superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS2 with twist angles from 0° to 120°. The twist angles-dependent Moiré periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS2 in bilayer MoS2 and density of TB-MoS2 are significantly improved to 17.2% and 28.9 pieces/mm2 by tailoring gas flow rate and molar ratio of NaCl to MoO3. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.

Atomic engineering of two-dimensional materials via liquid metals

“…This study offers a methodology for the in situ construction of 2D twisted materials and facilitating the employment of tBLGs in the field of electronics. In addition to the deep understanding of tBLG, the twisted TMDs have also been widely investigated, 266–269 but have not ever been achieved by liquid metals or alloys.…”