2024
DOI: 10.1038/s41598-024-66707-5
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Refining silicon nitride waveguide quality through femtosecond laser annealing

Pei-Hsun Wang,
Chien-Hung Chen,
Nien-Lin Hou
et al.

Abstract: We present a method for modification of silicon nitride (Si3N4) waveguide resonators using femtosecond laser annealing. The quality (Q) factor of the waveguide resonators can be improved by approximately 1.3 times after annealing. Notably, waveguides that originally had a high Q value maintained their quality after the annealing process. However, those with a lower initial Q value experienced a noticeable improvement post-annealing. To characterize the annealing effect, the surface morphologies of Si3N4 films,… Show more

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