2007
DOI: 10.1109/smicnd.2007.4519657
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Reliability Accelerated Testing of MEMS Acccelerometers

Abstract: An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-'.

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