Research on homodyne interferometric angle measurement based on ellipse fitting

Abstract

In this paper, the influence of the noise and acquisition device resolution of the system is researched on Homodyne Interferometric Angle Measurement Based on Ellipse Fitting. The research method combining data simulation and experimental verification is adopted. The influence of noise and acquisition resolution on the angular resolution is obtained by comparing the experimental and simulation results. The experimental verification results are consistent with the data simulation results. The system angle measurement resolution reaches 10-5 rad, and the system noise error is between 3%- 8%.