Research on Junction Termination Protection Technology for 3.3 kV Power Devices

Abstract

The necessary condition for power devices with enough blocking properties is Junction termination technology. In this paper, starting with the dose of rings, 3.3 kV Floating Filed Rings was investigated, and the influence of electric field and current density on the breakdown characteristic is also described. The results show that the dose of field rings directly affects the stability of breakdown voltage, this impact is relevant to the location of the peak electric field and the peak current density when breakdown was occurred. When the peak electric field appears in the middle of the field rings, the breakdown voltage is not sensitive to the dose of rings; however, when the peak electric field and strongest current density appeared on the edge of termination at the same time, breakdown voltage become very sensitive to the dose of rings because of the highest impact ionization in this position. Simulations and experiments indicate that the junction termination has better withstand voltage stability , when electric field distributes uniformly, the position of breakdown is in the middle of the termination, and the strongest current density appears in the main junction.