Resistive micro/nano flexible sensitive sensing based on silver nanowires and polydimethylsiloxane layering

Abstract

A flexible sensor refers to a type of sensor that possesses the ability to be bent and stretched. Typically composed of soft materials, these sensors demonstrate high deformability and adaptability. They are capable of conforming to complex shapes and surfaces, enabling the measurement of various physical quantities. The application prospects of flexible sensors are vast, encompassing fields such as biomedical sensing, health monitoring, virtual reality, and intelligent wearable devices. Micro and nano flexible sensors are commonly fabricated using techniques like inkjet printing or screen printing. However, these methods often necessitate the incorporation of sensitive materials into viscous substances, resulting in reduced sensor sensitivity. In order to concurrently meet the requirements for conductivity and structural integrity of the sensor's sensitive materials, a novel micro/nano flexible sensor was developed employing silver nanowires (AgNWs) and polydimethylsiloxane (PDMS). By selectively filtering silver nanowires, sensitive films are formed, and the structure of the sensitive materials is achieved by patterning the PDMS substrate. This approach effectively mitigates lateral effects while ensuring sensor sensitivity. The sensor exhibits the capability to detect deformations ranging from 0~5‰, with a minimum resolution of 0.1N for pressure detection. Additionally, it displays unidirectional strain sensitivity and possesses self-recovery characteristics.