2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) 2018
DOI: 10.1109/isiss.2018.8358124
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Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators

Michael Maurer
1
,
S. Rombach
2
,
Yiannos Manoli
3
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