2023
DOI: 10.1002/admi.202300472
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Reusability, Long‐Life Storage and Highly Sensitive Zirconium Nitride (ZrN) Surface‐Enhanced Raman Spectroscopy (SERS) Substrate Fabricated by Reactive Gas‐Timing Rf Magnetron Sputtering

Nguentra Sucheewa,
Winadda Wongwiriyapan,
Prapakorn Rattanawarinchai
et al.

Abstract: Transition metal nitrides (TMN) are promising material alternative to replace noble metals in the field of plasmonic applications, especially surface‐enhanced Raman spectroscopy (SERS). Here  we  demonstrate a practical surface enhanced Raman spectroscopy (SERS) substrate using zirconium nitride (ZrN) thin films grown by reactive gas‐timing (RGT) rf magnetron sputtering. The tailored properties of ZrN thin film exploited for SERS activity could be achieved to obtain a highly sensitive ZrN thin film SERS substr… Show more

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“…However, these methods often face problems such as complex sample preparation, time-consuming measurement, and difficulties in analyzing samples. 11 Currently, the development of surface chemistry and nanosynthesized techniques provides convenience for the fabrication of various functional materials, such as the modification of material surfaces, 12,13 the synthesis of template materials, 14 the substrates of distinct materials, 15 and so on. 16 The surface-enhanced Raman substrate is a prime example in the field of functional materials fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…However, these methods often face problems such as complex sample preparation, time-consuming measurement, and difficulties in analyzing samples. 11 Currently, the development of surface chemistry and nanosynthesized techniques provides convenience for the fabrication of various functional materials, such as the modification of material surfaces, 12,13 the synthesis of template materials, 14 the substrates of distinct materials, 15 and so on. 16 The surface-enhanced Raman substrate is a prime example in the field of functional materials fabrication.…”
Section: Introductionmentioning
confidence: 99%