Gas with ultrafine particle impaction on a solid surface is a unique case of curvilinear motion that can be widely used for the devices of surface coatings or instruments for particle size measurement. In this work, the Eulerian–Lagrangian method was applied to calculate the motion of microparticles in a micro impinging flow field with consideration of the interactions between particle to particle, particle to wall, and particle to fluid. The coupling computational fluid dynamics (CFD) with the discrete element method (DEM) was employed to investigate the different deposition patterns of microparticles. The vortex structure and two types of particle deposits (“halo” and “ring”) have been discussed. The particle deposition characteristics are affected both by the flow Reynolds number (Re) and Stokes number (stk). Moreover, two particle deposition patterns have been categorized in terms of Re and stk. Finally, the characteristics and mechanism of particle deposits have been analyzed using the particle inertia, the process of impinging (particle rebound or no rebound), vortical structures, and the kinetic energy conversion in two-phase flow, etc.