2020
DOI: 10.1039/d0ma00072h
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Role of the electronically-active amorphous state in low-temperature processed In2O3 thin-film transistors

Abstract: Process-structure-transport relationships in low-temperature-processed, blade-coated In2O3 transistors using sol–gel and combustion chemistries are explored with X-ray scattering techniques. Electron mobility of ≈4.5 cm2 V−1 s−1 is achieved at ≈220 °C.

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Cited by 13 publications
(9 citation statements)
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“…Recently, a solution-based process for metal-oxide semiconductor thin film has been actively studied. Additionally, the solution process has various methods for fabricating metal-oxide semiconductors such as spin coating [25,[32][33][34][35], spray coating [26,36], blade coating [37,38], flexographic printing [27], and inkjet printing [28,39]. Most solution-based processes have advantages for manufacturing flexible and printable devices because of the low annealing temperature.…”
Section: New Technology Of Metal-oxide Semiconductors 21 Vaccum and S...mentioning
confidence: 99%
See 1 more Smart Citation
“…Recently, a solution-based process for metal-oxide semiconductor thin film has been actively studied. Additionally, the solution process has various methods for fabricating metal-oxide semiconductors such as spin coating [25,[32][33][34][35], spray coating [26,36], blade coating [37,38], flexographic printing [27], and inkjet printing [28,39]. Most solution-based processes have advantages for manufacturing flexible and printable devices because of the low annealing temperature.…”
Section: New Technology Of Metal-oxide Semiconductors 21 Vaccum and S...mentioning
confidence: 99%
“…Most solution-based processes have advantages for manufacturing flexible and printable devices because of the low annealing temperature. 1d) [37]. Wang et al presented transistors based on IZO and IGZO using spray-combustion synthesis (SCS) [26].…”
Section: New Technology Of Metal-oxide Semiconductors 21 Vaccum and S...mentioning
confidence: 99%
“…[6] On the other hand, recent progress in solutionphase processing of semiconductor films has allowed the deposition of ultrathin layers (<10 nm) and the demonstration of numerous devices. [7][8][9][10][11][12][13] Despite the promise of scalable manufacturing, however, solution-based processing is often associated with the unintentional introduction of a high density of structural and chemical defects as compared to high-quality epitaxial layers. Therefore, an improved understanding of the relationship between the semiconductor's dimensionality and electronic properties is required.…”
Section: Introductionmentioning
confidence: 99%
“…29,30 The enhanced π–π stacking in TIPS pentacene is attributed to higher charge transport. 31 These research endeavors have opened up vast opportunities for organic semiconductors to be applied in high performance organic electronic devices such as organic thin film transistors, 32–35 organic gas sensors, 36–38 photovoltaic devices 39–41 and logic circuits. 42–44 In this section, we will review the important studies that investigated the solution processability and charge carrier mobility of organic semiconductor based thin film transistors, as well as their application in fabricating organic gas sensors.…”
Section: Introductionmentioning
confidence: 99%