“…The relative concentration of structural defects in Mn doped ZnO (ZnO:Mn), estimated through deep level emissions (DLE) in room temperature photoluminescence (PL) spectra, influence the exchange coupling of Mn in ZnO host matrix [8] making the origin of ferromagnetism controversial. The control and stability of structural defects in thin films of ZnO:Mn, to achieve room temperature ferromagnetism (RTFM) [9] through indirect ferromagnetic p-d exchange coupling, are a pre-requisite for spintronics device applications. Therefore, an investigation about the effects of deposition parameters on the stoichiometry of ZnO:Mn thin films is of strong fundamental and practical interest.…”