2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) 2024
DOI: 10.1109/mems58180.2024.10439362
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Room Temperature Nanophononics from 1 GHz – 110 GHz with Composite Piezoelectric Transducer HBARs

Vikrant J. Gokhale,
Jason A. Roussos,
Matthew T. Hardy
et al.
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