Room Temperature Terahertz Microbolometers

Peytavit, E.; Agnèse, P.; Buffet, J.-L. Ouvrier; Beguin, A.; Simoens, F.

doi:10.1109/icimw.2005.1572506

Cited by 15 publications

(6 citation statements)

References 3 publications

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“…In addition, when THz frequencies smaller than 3 THz are being targeted, the mismatch between membrane size and wavelength will quickly degrade the published noise equivalent power (NEP) (100 pW in the 3-4 THz range). The CEA-Leti THz pixel three-dimensional [21] stack differs substantially from standard IR bolometers. The key feature of this architecture relies on the separation between the two main functions of such sensors, i.e.…”

Section: Detector Technologymentioning

confidence: 99%

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Simoens

Meilhan

2014

Phil. Trans. R. Soc. A.

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The development of terahertz (THz) applications is slowed down by the availability of affordable, easyto-use and highly sensitive detectors. CEA-Leti took up this challenge by tailoring the mature infrared (IR) bolometer technology for optimized THz sensing. The key feature of these detectors relies on the separation between electromagnetic absorption and the thermometer. For each pixel, specific structures of antennas and a resonant quarter-wavelength cavity couple efficiently the THz radiation on a broadband range, while a central silicon microbridge bolometer resistance is read out by a complementary metal oxide semiconductor circuit. 320 × 240 pixel arrays have been designed and manufactured: a better than 30 pW power direct detection threshold per pixel has been demonstrated in the 2-4 THz range. Such performance is expected on the whole THz range by proper tailoring of the antennas while keeping the technological stack largely unchanged. This paper gives an overview of the developed bolometer-based technology. First, it describes the technology and reports the latest performance characterizations. Then imaging demonstrations are presented, such as realtime reflectance imaging of a large surface of hidden objects and THz time-domain spectroscopy beam twodimensional profiling. Finally, perspectives of camera integration for scientific and industrial applications are discussed.

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Section: Detector Technologymentioning

confidence: 99%

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Simoens

Meilhan

2014

Phil. Trans. R. Soc. A.

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“…On the base of this know-how, CEA-LETI has initiated the development of dedicated 2D THz sensors based on the adaptation of IR microbolometers to the THz range. The detection principle is based on the separation between the THz radiation absorber and the thermometer: each pixel of the Focal Plane Array consists in antenna-coupled microbolometer ( [29]). The optical collection function is provided by metallic antennas processed above a buried metallic reflector to achieve a resonant cavity that favors absorption.…”

Section: Introductionmentioning

confidence: 99%

Development of uncooled antenna-coupled microbolometer arrays for explosive detection and identification

et al. 2010

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Uncooled antenna-coupled microbolometer focal plane arrays have been specifically tailored for optimum performance in the 1-5 Terahertz range. A prototyping batch of 160 x 120 pixel chips has been designed and then processed above 8" silicon substrates. An actively illuminated system has been experimentally tested where Quantum Cascade Lasers (QCLs) are associated with the room-temperature operating 2D sensor. Whereas explosives samples were introduced in the THz beam optical path, the profile of the modified beam has been sensed by a unique pixel translated via an X-Y stage. These represent the first demonstration essays of explosive identification using our system.

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“…On the basis of its know-how in such thermal sensors and in sub-millimeter focal plane arrays (FPAs) [5], CEA-Leti has initiated a few years ago the development of fully THz customized bolometer [6]. After a research phase dedicated to model the pixel and to engineer specific technological processes, a complete program has been carried from 2008 till now.…”

Section: Introductionmentioning

confidence: 99%

Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

et al. 2013

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CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz.This paper reports the steps of this development, starting from the pixel level, to an array associated monolithically to its CMOS ROIC and finally a stand-alone camera. For each step, modeling, technological prototyping and experimental characterizations are presented.

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Room Temperature Terahertz Microbolometers

Cited by 15 publications

References 3 publications

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Development of uncooled antenna-coupled microbolometer arrays for explosive detection and identification

Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

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