Row-structure stencil planning approaches for E-beam lithography with overlapped characters

Kuang, Jian; Young, Evangeline F. Y.

doi:10.1016/j.vlsi.2016.07.002

Cited by 1 publication

(1 citation statement)

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“…This method is a kind of technology using a series of produce procedure to deprive specific section on target surfaces, forming micro‐/nanohierarchical structures. The lithography includes photolithography, electron‐beam (e‐beam) lithography, X‐ray lithography, nanoimprint lithography, and colloidal lithography (soft lithography) . Traditional lithography will choose a flat plate as mask surface.…”

Section: Fabrication Of Superhydrophobic Surfacementioning

confidence: 99%

Wetting Models and Working Mechanisms of Typical Surfaces Existing in Nature and Their Application on Superhydrophobic Surfaces: A Review

Jiaqiang

Deng

et al. 2017

Adv Materials Inter

115

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decades, researchers have shown great interests in bionics, which was a new multidisciplinary subject inspired by biological characteristics and features to imitate it to build technology devices. [1] With the rise of biomimetic biomaterial researches, a lot of attention was paid on the observation of living organism, especially on plant leaves, such as lotus, rice, taro leaves, etc. [2] As the development of scanning electron microscope (SEM), a wealth of data dealing with SEM of plant surface has been published since 1960s. [3] The cuticular structure was investigated with regard to function, and substances that were secreted onto the cuticle had great effects on the surface properties, while intracuticular waxes were the main barrier to wettability. [4] Some kinds of special wettability like superhydrophobicity and superhydrophilicity were also found in other surfaces, such as self-cleaning lotus leaf, [5] hydrophilicity of red rose petals, [6,7] the anisotropic dewetting behavior on rice leaf, [8,9] hydrophobicity of shark skin, [10] gecko toe, [11] insect wings, [12] etc., and striking superhydrophobic force provided by a water strider's legs, [13] and they were all related to the unique microstructures on their surface. In fact, the special wettability of surfaces is attributed to the interaction of both the surface microstructures and surface covers. As the development and progress of the observation device, smaller nanosized structures were found on the microstructure, and better properties of multiscale hierarchical structure was shown then. [14] Wetting is a phenomenon that solid interface was transferred from solid-gas interface to solid-liquid interface, wettability was a kind of ability that a liquid could be unfolded on one solid surface. The wettability of surface could be characterized by contact angle (CA) of interface. Sliding angle (SA) and contact angle hysteresis were introduced to evaluate the highly valued superhydrophobicity and superhydrophilicity of surfaces. Superhydrophilicity was defied as that of CA was smaller than 5°, superhydrophobicity was defied as that of CA was greater than 150°, as well as a really small sliding angle. It is worth noting that many researchers applied themselves to excavate the theories under the phenomena. Young's equation, Wenzel equation, and Cassie-Baxter equation [15,16] were the representations of hundreds years of research results. Improving and developing Surfaces of plants and animals are evolved to optimal states to accommodate environments better after billions of years of natural selection. As the development of further study on bionics, surfaces with special wetting properties in nature are discovered, extremely related to the micro-/nanostructures on surface. The wetting models and wetting mechanism of several surfaces in nature are investigated, followed by lifting the veil of superhydrophobic field. Various facile, effective, and convenient methods for fabricating superhydrophobic surfaces are obtained and optimized in scientific research and ...

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