Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS

“…A solution based on silicon reflectors was also sought by Kitching et al to achieve a crossed beam configuration for an atomic magnetometer 37 . A multilayer dielectric coating deposited on the silicon sidewalls to efficiently reflect circularly polarized beams was implemented by Perez et al 38 . Indeed, dielectric mirrors are preferable over metallic mirrors since they do not affect the magnetic field and do not react with alkali metals.…”

Section: Methodsmentioning

confidence: 99%

Laser light routing in an elongated micromachined vapor cell with diffraction gratings for atomic clock applications

Chutani

Maurice

Passilly

et al. 2015

Sci Rep

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This paper reports on an original architecture of microfabricated alkali vapor cell designed for miniature atomic clocks. The cell combines diffraction gratings with anisotropically etched single-crystalline silicon sidewalls to route a normally-incident beam in a cavity oriented along the substrate plane. Gratings have been specifically designed to diffract circularly polarized light in the first order, the latter having an angle of diffraction matching the (111) sidewalls orientation. Then, the length of the cavity where light interacts with alkali atoms can be extended. We demonstrate that a longer cell allows to reduce the beam diameter, while preserving the clock performances. As the cavity depth and the beam diameter are reduced, collimation can be performed in a tighter space. This solution relaxes the constraints on the device packaging and is suitable for wafer-level assembly. Several cells have been fabricated and characterized in a clock setup using coherent population trapping spectroscopy. The measured signals exhibit null power linewidths down to 2.23 kHz and high transmission contrasts up to 17%. A high contrast-to-linewidth ratio is found at a linewidth of 4.17 kHz and a contrast of 5.2% in a 7-mm-long cell despite a beam diameter reduced to 600 μm.

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“…The hight h g and the inner radius of the cell r g , shown in Fig. 11, are given by equations (9) and (10), respectively [36]…”

Section: B Glassblown Atomic Vapor Cellmentioning

confidence: 99%

MEMS Components for NMR Atomic Sensors

Noor

Shkel

2018

J. Microelectromech. Syst.

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This paper introduces a batch fabrication method to manufacture micro-electromechanical system (MEMS) components for nuclear magnetic resonance (NMR) atomic sensors, such as NMR gyroscope (NMRG) and NMR magnetometer (NMRM). The components presented are: 1) micro-coils generating the magnetic field with the magnetic field homogeneity of H = 354 ppm; 2) spherical micro-fabricated atomic cells confining alkali metal and noble gases; 3) micro-heaters keeping the alkali metal in a vapor state while minimizing residual magnetic fields; and 4) origamilike silicon structures with integrated optical reflectors preserving 90.9% of the light polarization. The introduced design utilized a glassblowing process, origamilike folding, and a more traditional MEMS fabrication. We presented an analytical model of imperfections, including errors associated with microfabrication of MEMS components. In light of the developed error model, phenomenological dynamic model describing NMR sensors, and experimental evaluation of components, we predicted the effect of errors on performance of NMRG and NMRM. We concluded that with a realistic design, a 5-mrad angular misalignment between coils and folded mirrors, and a 100-µm linear misalignment between folded coils, it would be feasible to achieve an NMRG with ARW 0.1 deg/rt-hr and an NMRM with sensitivity on the order of 10 fT/rt-Hz.

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Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS

Cited by 25 publications

References 22 publications

Chip-scale atomic devices

Chip-scale atomic devices

Laser light routing in an elongated micromachined vapor cell with diffraction gratings for atomic clock applications

MEMS Components for NMR Atomic Sensors

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