“…Our experience proves that the analysis of several already designed, installed and commissioned FEs frequently shows that NTE for these FEs is much larger than the nominal AIE that was used for their initial design (there is some information on this topic in Ref. [6]).…”
“…Our experience proves that the analysis of several already designed, installed and commissioned FEs frequently shows that NTE for these FEs is much larger than the nominal AIE that was used for their initial design (there is some information on this topic in Ref. [6]).…”
“…The AI-ID is getting engaged for open IDPS at beam current of 0.2 mA (the lowest reliably readable non-zero current). It was determined [3] that with the IDPS closed the FEs can be operated safely with not interlocked e-beam under 2 mA beam current. Below we will define the SCL below which both the typical FE and the typical BL can be safely operated with open IDPS and not interlocked ebeam.…”
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