“…[3,4] In particular, silicon nanowire FETs (SiNWFETs) have been used successfully for different sensing experiments. Although successful chemical sensing [5,6,7,8,9,10,11], label-free biosensing [12,3,13,4,14,15,16,17] and the recording of intracellular action potentials [18] have been demonstrated, the only commercial application is still pH sensing [3,19,20,21,22]. The reason for this development lies in the use of bare, high quality oxide surfaces such as Al 2 O 3 or HfO 2 which exhibit a high number of surface hydroxyl groups.…”