Sensing nitrous oxide with QCL-coupled silicon-on-sapphire ring resonators

Smith, Christian; Shankar, R.; Laderer, M. C.; Frish, Michael B.; Lončar, Marko; Allen, Mark G.

doi:10.1364/oe.23.005491

Cited by 40 publications

(27 citation statements)

References 30 publications

(36 reference statements)

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“…One is to design the true optical length structures such as the spiral waveguides [88]. The other is to use the resonator, such as MRRs, to guide the light with multiple passes [89].…”

Section: Applications For Mir Photonic Sensorsmentioning

confidence: 99%

Silicon photonic platforms for mid-infrared applications [Invited]

et al. 2017

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Silicon photonic integrated circuits for telecommunication and data centers have been well studied in the past decade, and now most related efforts have been progressing toward commercialization. Scaling up the silicon-oninsulator (SOI)-based device dimensions in order to extend the operation wavelength to the short mid-infrared (MIR) range (2-4 μm) is attracting research interest, owing to the host of potential applications in lab-on-chip sensors, free space communications, and much more. Other material systems and technology platforms, including silicon-on-silicon nitride, germanium-on-silicon, germanium-on-SOI, germanium-on-silicon nitride, sapphireon-silicon, SiGe alloy-on-silicon, and aluminum nitride-on-insulator are explored as well in order to realize low-loss waveguide devices for different MIR wavelengths. In this paper, we will comprehensively review silicon photonics for MIR applications, with regard to the state-of-the-art achievements from various device demonstrations in different material platforms by various groups. We will then introduce in detail of our institute's research and development efforts on the MIR photonic platforms as one case study. Meanwhile, we will discuss the integration schemes along with remaining challenges in devices (e.g., light source) and integration. A few application-oriented examples will be examined to illustrate the issues needing a critical solution toward the final production path (e.g., gas sensors). Finally, we will provide our assessment of the outlook of potential future research topics and engineering challenges along with opportunities.

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“…One is to design the true optical length structures such as the spiral waveguides [88]. The other is to use the resonator, such as MRRs, to guide the light with multiple passes [89].…”

Section: Applications For Mir Photonic Sensorsmentioning

confidence: 99%

Silicon photonic platforms for mid-infrared applications [Invited]

et al. 2017

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show abstract

“…A ring resonator fabricated on the SOS platform was used for N 2 O sensing at 4.5 µm with a detection limit of 5000 ppmv (Fig. 7d) [157]. Unlike spiral waveguide sensors and slot waveguide sensors where data analysis is performed by studying the intensity change at the analytes' fingerprint, the resonance spectrum is necessary for resonatorbased guided-wave nanophotonic biochemical sensors so that the Q factor can be extracted.…”

Section: Sensor Configurations and System Integrationmentioning

confidence: 99%

“…c Slot waveguide (Reproduced with permission from [156]). d Micro-ring resonator (Reproduced with permission from [157]). e Enhancement layer coating (Reproduced with permission from [148]).…”

Section: Sensor Configurations and System Integrationmentioning

confidence: 99%

Progress of infrared guided-wave nanophotonic sensors and devices

Dong

Lee

2020

Nano Convergence

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Nanophotonics, manipulating light-matter interactions at the nanoscale, is an appealing technology for diversified biochemical and physical sensing applications. Guided-wave nanophotonics paves the way to miniaturize the sensors and realize on-chip integration of various photonic components, so as to realize chip-scale sensing systems for the future realization of the Internet of Things which requires the deployment of numerous sensor nodes. Starting from the popular CMOS-compatible silicon nanophotonics in the infrared, many infrared guided-wave nanophotonic sensors have been developed, showing the advantages of high sensitivity, low limit of detection, low crosstalk, strong detection multiplexing capability, immunity to electromagnetic interference, small footprint and low cost. In this review, we provide an overview of the recent progress of research on infrared guided-wave nanophotonic sensors. The sensor configurations, sensing mechanisms, sensing performances, performance improvement strategies, and system integrations are described. Future development directions are also proposed to overcome current technological obstacles toward industrialization.

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“…Traditional on-chip microcavity absorption spectrometers measure the change in complex refractive index, the sensitivity of which is largely limited by scattering loss from cavity sidewall roughness [27][28][29][30][31][32] . In order to achieve sensitivities comparable to state-of-the-art benchtop spectroscopy instruments, on-chip sensors must exploit unique properties of their reduced size and waveguiding materials.…”

Section: Chip-scale Optical Cavity-enhanced Photothermal Spectroscopymentioning

confidence: 99%

On-chip infrared sensors: redefining the benefits of scaling

et al. 2017

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Infrared (IR) spectroscopy is widely recognized as a gold standard technique for chemical and biological analysis.Traditional IR spectroscopy relies on fragile bench-top instruments located in dedicated laboratory settings, and is thus not suitable for emerging field-deployed applications such as in-line industrial process control, environmental monitoring, and point-of-care diagnosis. Recent strides in photonic integration technologies provide a promising route towards enabling miniaturized, rugged platforms for IR spectroscopic analysis. It is therefore attempting to simply replace the bulky discrete optical elements used in conventional IR spectroscopy with their on-chip counterparts. This size down-scaling approach, however, cripples the system performance as both the sensitivity of spectroscopic sensors and spectral resolution of spectrometers scale with optical path length. In light of this challenge, we will discuss two novel photonic device designs uniquely capable of reaping performance benefits from microphotonic scaling. We leverage strong optical and thermal confinement in judiciously designed micro-cavities to circumvent the thermal diffusion and optical diffraction limits in conventional photothermal sensors and achieve a record 104 photothermal sensitivity enhancement. In the second example, an on-chip spectrometer design with the Fellgett's advantage is analyzed. The design enables sub-nm spectral resolution on a millimeter-sized, fully packaged chip without moving parts.

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Sensing nitrous oxide with QCL-coupled silicon-on-sapphire ring resonators

Cited by 40 publications

References 30 publications

Silicon photonic platforms for mid-infrared applications [Invited]

Silicon photonic platforms for mid-infrared applications [Invited]

Progress of infrared guided-wave nanophotonic sensors and devices

On-chip infrared sensors: redefining the benefits of scaling

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