2001
DOI: 10.1143/jjap.40.3389
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Separation of Townsend Secondary Electron Emission Coefficients by Frequency Response Analysis

Abstract: A procedure to separate the Townsend secondary electron emission coefficient γT into three components γTi, γTp and γTm due to ions, photons and metastables, respectively, is presented. The amplification system of ionization current in the form of a positive feedback amplifier with three feedback paths is analyzed in the frequency domain with the system functions given as the Fourier transform of the dynamic properties in the respective paths. The system functions in the three paths change values in different f… Show more

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