Short pulse soft x-ray laser ablation research

Abstract

The short pulse laser ablation have been extensively studied for confirmation and discussion of damage formation including estimations of damage thresholds and probabilities of surface machining. Irradiation examines by the femtosecond soft xray laser reveals formations of smooth craters on silica glass surfaces, and the appropriate selection of the laser wavelength can make the nanometer size modification on silicon surface in the vicinity of the damage threshold. On the other hand, we also revealed that damage thresholds and modification structures obtained by the picosecond soft x-ray laser irradiation provide the same results as the femtosecond soft x-ray laser. This means that not only femtosecond but also picosecond soft x-ray laser irradiation experiments can be contribute to deep understandings of the ablation phenomena.