Abstract:We propose a new signal processing method using Karhunen–Loève (KL) expansion for wafer focus measurement in lithography. With the improvement in the critical dimension (CD) accuracy, more high accuracy of wafer focus measurement becomes to be necessary. Recently, it is said that focus accuracy should be required within several ten nanometers. The accuracy of the focus measurement of the actual process wafer does not meet the requirement values due to the complexity of its structure. The objective of this stud… Show more
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