Silent-discharge driven excimer UV sources and their applications

Kogelschatz, U.

doi:10.1016/0169-4332(92)90080-h

Cited by 168 publications

(45 citation statements)

References 68 publications

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“…Furthermore, under the conditions of BD operation in noble gases at atmospheric pressure, an intensive UV and VUV radiation due to excimer formation is generated [1,4,53,68,69]. This short-length radiation is used in a wide spreading field of material processing, in particular, for surface modification, polymer etching, or alternatively-for the deposition of thin metallic layers and for the polymerization of laquers (see chapter 3.2.2).…”

Section: Fields Of Applicationmentioning

confidence: 99%

The barrier discharge: basic properties and applications to surface treatment

Wagner

Brandenburg

Kozlov

et al. 2003

Vacuum

682

474

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Barrier discharges (BDs) produce highly non-equilibrium plasmas in a controllable way at atmospheric pressure, and at moderate gas temperature. They provide the effective generation of atoms, radicals and excited species by energetic electrons. In the case of operation in noble gases (or noble gas/halogen gas mixtures), they are sources of an intensive UV and VUV excimer radiation. There are two different modes of BDs. Generally they are operated in the filamentary one. Under special conditions, a diffuse mode can be generated. Their physical properties are discussed, and the main electric parameters, necessary for the controlled BD operation, are listed. Recent results on spatially and temporally resolved spectroscopic investigations by cross-correlation technique are presented. BDs are applied for a long time in the wide field of plasma treatment and layer deposition. An overview on these applications is given. Selected representative examples are outlined in more detail. In particular, the surface treatment by filamentary and diffuse BDs, and the VUV catalyzed deposition of metallic layers are discussed. BDs have a great flexibility with respect to their geometrical shape, working gas mixture and operation parameters. Generally, the scaling-up to large dimensions is of no problem. The possibility to treat or coat surfaces at low gas temperature and pressures close to atmospheric once is an important advantage for their application.

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Section: Fields Of Applicationmentioning

confidence: 99%

The barrier discharge: basic properties and applications to surface treatment

Wagner

Brandenburg

Kozlov

et al. 2003

Vacuum

682

474

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show abstract

“…To further improve the efficiency of charging nanoparticles, researchers have used direct irradiation methods such as Ultraviolet (UV) (Burtscher et al, 1982;Jung et al, 1988;Kogelschatz, 1992;Matter et al, 1995;Mohr et al, 1996;Mohr and Burtscher, 1997;Maisels et al, 2003;Hontañón and Kruis, 2008) and soft x-ray irradiation for nanoparticle charging (Kulkarni et al, 2002, Shimada et al, 2002Han et al, 2003;Jiang et al, 2007a). Under UV exposure, electrons can be emitted from the particle surface once irradiated, and irradiated particles thus become positively charged if the incident photon energy exceeds the particle material work function.…”

Section: Introductionmentioning

confidence: 99%

“…Schmidt-Ott and Siegmann (1978) investigated photoemission from small particles suspended in a gas upon the irradiation of UV light. Two different UV light sources were used later in research related to aerosol charging: lowpressure mercury lamps (Burtscher et al, 1982;Jung et al, 1988) and excimer lamps (Kogelschatz, 1992;Maisels et al, 2003). The Hg lamp used in Burtscher's charger was bulky, and the charging efficiency was very low (about 12% for 10 nm Ag particles).…”

Section: Introductionmentioning

confidence: 99%

“…Excimer lamps usually have larger photon energy and consequently provide higher particle charging efficiency. Using the apparatus developed by Kogelschatz (1992), Mohr et al (1996) obtained an average charge of up to 25 elementary units for diesel particles with a diameter of 100 nm. Furthermore, Mohr and Burtscher (1997) observed a reduction of charging efficiency when the particle concentration was in the range of 10 5 -10 6 #/cm 3 , and the residence time of the ions in the aerosol exceeded a few tens of milliseconds.…”

Section: Introductionmentioning

confidence: 99%

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Aerosol Charging Using Pen-Type UV Lamps

Lin

Chen

2011

Aerosol Air Qual. Res.

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A portable aerosol charger utilizing pen-type Hg lamps was constructed to investigate the particle charging process under UV irradiation. The charger primarily consisted of a quartz tube surrounded by four pen-type low-pressure Hg lamps and an ion trap located downstream of the quartz tube to remove excessive ions. The performance of the prototype UV charger at 5 L/min flow rate and with four UV lamps turned on using monodisperse silver (Ag) particles with diameters ranging from 7 to 30 nm was evaluated. As expected, the prototype UV charger provided higher particle charging efficiencies than coronabased unipolar chargers for Ag particles. To evaluate the effect of irradiation intensity on particle photocharging, the charging efficiencies and charge distributions for Ag particles ranged from 7 to 30 nm when the prototype was operated at an aerosol flow rate of 5 L/min for the cases of one, two, and four lamps turned on. The UV charging model with the photoemission based on the Fowler-Nordheim law was further applied to predict the charging performance of the UV charger at different operational conditions.

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“…Rare-gas based excilamps are used for applications in photochemistry, photobiology, surface treatment, mercury-free lamps and photochemical technology [4][5][6][7][8][9][10][11][12]. These applications often concern dielectric barrier excimer lamps.…”

Section: Introductionmentioning

confidence: 99%

Temperature dependence of xenon excimer formations using two-photon absorption laser-induced fluorescence

Marchal¹,

Sewraj²,

Jabbour³

et al. 2010

J. Phys. B: At. Mol. Opt. Phys.

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Abstract. The temporal dependence of VUV emissions of the first continuum of xenon at around 150 nm are investigated for pressures ranging from 10 to 100 Torr and for temperatures ranging from 200 to 300 K, after briefly and selectively populating exclusively the resonant or the metastable atomic states of the 5p 5 6s configuration. A kinetic and spectroscopic study was performed by analyzing the VUV post luminescence decay of xenon operating with such excitation conditions. Our results clearly show the temperature effects on the rate constants α 31 and α 32 of formation of excimers correlated respectively to the first resonant and the first metastable states by three-body collisions. The resulting reaction rates are obtained as a function of temperature T : α 31 = 3.90 × 10 −27 T −1.78 cm −6 s −1 , α 32 = 1.34 × 10 −27 T −1.70 cm −6 s −1 . For the whole pressure range, low temperatures favour the formation of xenon excimers and the efficiency of the three-body collisions in forming stabilized excimers increases with decreasing temperature

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Silent-discharge driven excimer UV sources and their applications

Cited by 168 publications

References 68 publications

The barrier discharge: basic properties and applications to surface treatment

The barrier discharge: basic properties and applications to surface treatment

Aerosol Charging Using Pen-Type UV Lamps

Temperature dependence of xenon excimer formations using two-photon absorption laser-induced fluorescence

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