Abstract:of the surface oxide layer of SiNWs could be removed and the surface composition may be changed. Meanwhile, for the nitridation, there will be a nitride layer formed due to the reaction between the oxide and nitrogen species and the silicon nitride is air inert to the exposure and can prevent SiNWs from further oxidation. Silicon nanowires (SiNWs) HF treatment The silicon oxide layer of SiNWs serves as a protective layer rendering SiNWs relatively inert. The inertness of SiNWs is unfavorable for SiNWs applicat… Show more
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