Silicon-on-Insulator (SOI) Ring Resonator-Based Integrated Optical Hydrogen Sensor

Yebo, Nebiyu Adello; Taillaert, Dirk; Roels, Joris; Lahem, Driss; Debliquy, Marc; Thourhout, Dries Van; Baets, Roel

doi:10.1109/lpt.2009.2021073

Cited by 62 publications

(63 citation statements)

References 11 publications

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“…An optical setup consisting of a small gas chamber, a tunable laser and an infrared camera is used for the sensing experiments [12,14]. Before measuring the sensor response to NH 3 and CO 2 , reference signals are recorded using pure carrier gas (nitrogen) flowing in the test chamber.…”

Section: Sensing Experimentsmentioning

confidence: 99%

“…Straight forward multiplexing of sensor arrays on a chip is another potential benefit of the silicon nano-photoincs platform for compact multi-gas analysis [11]. One of the silicon photonic components proving to be suitable for sensing applications is an optical micro-ring resonator (MRR) [11][12][13][14][15]. The resonance condition of an MRR shows high sensitivity to small changes in the surrounding refractive index.…”

Section: Introductionmentioning

confidence: 99%

“…Nevertheless, this device still remains complex due to the requirement for an expensive light source and phase sensitive (lock-in) instrumentation. With the potential to selectively detect sub ppm -ppb concentrations using chemically functionalized MRRs, silicon nanophotonic gas sensors can take advantage of their miniature feature and potentially low cost CMOS fabrication for portable sensing applications [9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

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Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Yebo¹,

Sree²,

Levrau³

et al. 2012

Opt. Express

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Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH 3 with selectivity relative to CO 2 . The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH 3 within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications. ©2012 Optical Society of America

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Section: Sensing Experimentsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Yebo¹,

Sree²,

Levrau³

et al. 2012

Opt. Express

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“…Optical gas sensors can be realized either with direct light -gas interaction or with the aid of transducer chemical coatings on optical circuits [1,4]. Gas sensitive chemical coatings significantly reduce the very long interaction length that would have been required if a direct spectroscopy of gases were used.…”

Section: Integrated Optical Gas Sensing With Soi Circuits Coated Withmentioning

confidence: 99%

Integrated Optical Gas Sensors on Silicon-on-Insulator Platform

Yebo

Taillaert

Roels

et al. 2010

Integrated Photonics Research, Silicon and Nanophotonics and Photonics in Switching

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Abstract:We demonstrate highly sensitive micro-optical hydrogen and ethanol sensors on SOI microring resonators (MRR) using chemical coatings sensitive to the corresponding gases. Hydrogen concentrations below the lower explosion limit and ethanol vapor concentration below 100ppm are detected. ©2010 Optical Society of AmericaOCIS codes: (000.0000) General; (000.0000) IntroductionApplications such as environmental pollution monitoring, industrial process & explosion control, and forensic breath analysis heavily rely on gas sensors.The Optical gas sensing route is becoming attractive compared to other competitive technologies, such as electrical gas sensors, for various reasons. Robustness, multiplexing of sensor arrays, safety, remote sensing and low power consumption are among the interesting features about the optical sensors [1].Most of the optical sensors reported to date have been based on optical fibers. These sensors have enabled multiplexed multipoint and remote gas sensing. However, fiber optical sensors are not convenient for integration. On the other hand, inexpensive and compact gas sensors which can elegantly fit to a wide range of applications have been of a significant interest in the gas sensing community. The possibility to miniaturize gas sensors opens a way to a chip level implementation, integration with other vital functionalities, and mass fabrication. This way, fairly cheap, highly compact and multi -purpose gas sensors can be available. However, the implementation of optical gas sensors at integrated level has been challenging mainly due to the technological limitations.Optical structures fabricated on the silicon on insulator (SOI) platform have recently been proving to be promising for a wide range of integrated optical applications [2]. These structures have been demonstrated with submicron scale features and can be realized on a very small area on a chip owing to the high index contrast between the waveguides and the surrounding claddings. Moreover, the compatibility of the SOI devices to CMOS fabrication tools and the promise of inexpensive mass fabrication makes them highly attractive. Owing to these facts, the research on SOI optical structures is recently extending beyond the telecom to other applications such as optical bio-molecule and gas sensing.We demonstrate two highly sensitive gas sensors, namely, a hydrogen sensor and an ethanol sensor based on SOI microring resonators.

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“…Several gas sensing mechanisms, such as spectrometric sensing [2], electrochemical [3], [4], solid state semiconductor [5] and microcontroller based devices [6], have been reported and demonstrated in recent years. Besides, dielectric waveguide based interferometric and resonating structure, for breathing [7], H 2 [8] and CH 3 CH 2 OH [9] sensing is more convenient for its high sensitivity and compact lab-ona-chip design. In this paper, we proposed a novel, compact ethanol vapor sensor based on hybrid plasmonic based horizontal slotted [10] waveguide which offers a high sensitivity along with nanometer scale footprint.…”

Section: Introductionmentioning

confidence: 99%

A Compact Mach–Zehnder Interferometer Using Composite Plasmonic Waveguide for Ethanol Vapor Sensing

Ghosh

Rahman

2017

J. Lightwave Technol.

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Silicon-on-Insulator (SOI) Ring Resonator-Based Integrated Optical Hydrogen Sensor

Cited by 62 publications

References 11 publications

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Integrated Optical Gas Sensors on Silicon-on-Insulator Platform

A Compact Mach–Zehnder Interferometer Using Composite Plasmonic Waveguide for Ethanol Vapor Sensing

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