Silicon Pore Optics

Abstract

Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided superpolished silicon wafers as a basis to produce mirrors that form lightweight high-resolution X-ray optics. The technology has been invented by cosine Measurement Systems and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. It leverages techniques and processes developed over decades by the semiconductor industry to handle, process, and clean silicon wafers and plates. SPO is an enabling technology for large space-borne X-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution aiming for 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research.

Update on the ongoing ATHENA optic testing at PANTER

“…In June 2022 the SPO mirror module MM-0051 was tested at the PANTER X-ray test facility. The mirror module MM-0051 demonstrates characteristics of the middle radius region of the optic designed for the ATHENA telescope [7], although with a different rib pitch. The detailed specifications for this SPO optic are given in Table 1.…”