“…29 With this technique, 9,14,15,19,29,30 a dense SNF layer can be grown on various substrates, including glass, silicon, ceramics, Titanium, Aluminium, cotton fabrics, silk, wood, polyethylene, and so on, by either gas 19,30 or liquid (wet toluene) 9 55 phase deposition of trichloromethylsilane (TCMS) in the presence of a trace amount of water (ca. 50 ppm to 200 ppm) 9 at room temperature (Fig.…”