Silver on diamond Schottky diodes formed on boron doped hot-filament chemical vapor deposited polycrystalline diamond films

Abstract

Schottky diodes were fabricated using sputter deposited silver contacts to boron doped polycrystalline diamond thin films grown by a hot-filament chemical vapor deposition process with trimethyl borate as an in situ dopant source. High forward current density and a high forward-to-reverse current ratio were exhibited by these diodes. Current density-voltage and capacitance-voltage-frequency characteristics of these diodes are very similar to those of Schottky diodes fabricated using a single-crystal diamond substrate.

Electron spectro-microscopic determination of barrier height and spatial distribution of Au and Ag Schottky junctions on boron-doped diamond (001)

“…Usually, wet chemical treatments with acid mixtures at elevated temperatures are used. 1,[3][4][5][6]8,10,[15][16][17]24,[27][28][29][30]32) Sometimes, (oxygen) plasma treatment was employed. 10,17,18) Recently, irradiation with ultraviolet (UV) or vacuum ultraviolet (VUV) light under ozone and/or active oxygen environment has been performed to form O-terminated p-type diamond surfaces, which increases the breakdown voltage for the reverse voltage.…”

“…Au is one of the most frequently used metals for evaluating Schottky junctions, and Ag is not often used for this purpose. To the authors' knowledge, Zhao et al 32) were the first to report a Ag Schottky junction on polycrystalline B-doped diamond. Recently, a Ag Schottky junction on Bdoped diamond (001) has been tested and a Schottky barrier height (SBH) of approximately 1.9 eV has been reported.…”

Ultra-High Temperature Sensors Based on Optical Property

“…A gas sensing mechanism has been proposed for these Schottky sensors [29][30]. Also boron has been already successfully used for detection of methane [31].…”