Simulation Analysis of High Frequency and High Pressure Piezoelectric Micro-Pump

Ni, Jiafeng; Xuan, Weipeng; Li, Yilin; Li, Wenjun; Dong, Shurong; Luo, Jikui

doi:10.1109/spawda56268.2022.10046021

2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) 2022

DOI: 10.1109/spawda56268.2022.10046021

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Simulation Analysis of High Frequency and High Pressure Piezoelectric Micro-Pump

Jiafeng Ni

Weipeng Xuan

Yilin Li

et al.

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Simulation Analysis of High Frequency and High Pressure Piezoelectric Micro-Pump

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