Simulation and experimental validation of a SU-8 based PCR thermocycler chip with integrated heaters and temperature sensor

El-Ali, Jamil; Perch-Nielsen, Ivan R.; Poulsen, Claus; Bang, Dang Duong; Telleman, Pieter; Wolff, Anders

doi:10.1016/j.sna.2003.09.022

Cited by 147 publications

(105 citation statements)

References 20 publications

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“…In this respect, the cost of SU-8 lithography is considerably lower than that of other techniques, notably LIGA process (for photoresist) and the deep reactive ion etching (for silicon). SU-8 has been integrated in a number of micro devices, including microfluid devices, [82] artificial haircell flow sensors [83] (Fig. 4), SPM probes, [84] manipulators, [85] and micro needles for drug delivery.…”

Section: D) Su-8 Epoxymentioning

confidence: 99%

Recent Developments in Polymer MEMS

2007

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Polymer materials, including elastomers, plastics and fibers, are being actively used for MEMS sensors and actuators. Polymer materials provide many advantages in terms of cost, mechanical properties, and ease of processing. In addition, polymers are being investigated for displays, memory, and circuitry. However, the incorporation of polymers for structural or functional purposes in MEMS systems raises new issues and challenges. This article provides a comprehensive review of the recent state of the art of polymer based MEMS—including materials, fabrication processes, and representative devices, including microfluidic valves and tactile sensors. Frequently used materials are reviewed, including polydimethylsiloxane (PDMS), parylene, nanocomposite elastomers, and SU‐8 epoxy.

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Section: D) Su-8 Epoxymentioning

confidence: 99%

Recent Developments in Polymer MEMS

2007

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“…21 Its good thermal stability and compatibility with electrode integration have enabled its use in polymerase chain reactors. 22 More recently, paper and woven fabrics have emerged as inexpensive substrate materials for simple fluidic devices. 23 Sub-millimeter channel structures can be defined on paper by the printing of hydrophobic (e.g., wax) patterns.…”

Section: B Exploration Of Alternative Polymeric Materialsmentioning

confidence: 99%

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

310

207

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This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. I. WHY USE SILICON AND GLASS IN MICRO-AND NANO-FLUIDIC APPLICATIONS?Micro-and nano-fluidic technology continues to be embraced by biologists, 1-3 chemists, 4 and engineers throughout academia and industry. As its applications have expanded, there has been an explosion in the range of materials and processes used to fabricate these devices. The earliest microfluidic devices (e.g., gas 5 and liquid 6 chromatography devices) were made from silicon and glass and borrowed processes directly from semiconductor and microelectromechanical systems (MEMS) manufacturing. 7 Now, however, many researchers have moved away from silicon and glass, and instead use cast elastomers such as polydimethylsiloxane (PDMS)-which is ideal for swift prototyping-or thermoplastic polymers, which can be hot-embossed or injection-molded and are well suited to inexpensive manufacturing. Yet, there remain many applications where glass and silicon offer advantages over polymeric materials. In this paper, we highlight these advantages and offer a framework for selecting fabrication processes when using silicon and glass. A. The dominance of soft lithographyOver the last decade, PDMS has become virtually the default material for forming microfluidic devices, 8 because of the sheer ease with which it can be cast on to a micro-scale mould and then strongly bonded to glass. 9 The elastomeric nature of the material has been exploited to integrate fluidic valves and pumps on-chip and has simplified the production of multi-layer devices because the soft layers readily conform to each other. 10,11 Yet, the low stiffness (usually <1 MPa) of PDMS relative to amorphous thermoplastics, silicon, and glass has its own a) Authors to whom correspondence should be addressed. Electronic addresses: ciliescu@ibn.a-star.edu.sg and hkt@ntu.edu.sg. 6, 016505 (2012) drawbacks. High aspect-ratio channels are notoriously difficult to fabricate in PDMS because of their propensity to collapse. 12 Moreover, difficulties in automating the handling of such a soft material have hampered efforts to scale up PDMS device manufacturing. Meanwhile, PDMS's high oxygen and water permeabilities have proved both a blessing and a curse in different applications.The hydrophobic nature of PDMS can be an important consideration for some biological applications. In drug screening applications, for example, hydrophobic drugs as well as metabolites (urea or albumin) can be absorbed into the device's material due to hydrophobic--hydrophobic interaction...

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“…In general, this type of chamber stationary PCR chips can be classified as single chamber [15][16][17] and multi-chamber [18][19][20] chips, as shown in Fig.1.…”

Section: Chamber Stationary Pcr Chipmentioning

confidence: 99%

Microfluidic PCR Chips

Chen¹,

Chen²,

Yuan³

et al. 2011

Nano BioMed ENG

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The microfluidic polymerase chain reaction (PCR) chips have undergone extensive development and nowadays have become an important domain of miniaturization technology application. Here, we review the advances of microfluidic PCR chips over the past years, from the first single chamber stationary PCR chip to the new SlipChip PCR. First, the three distinct types of microfluidic PCR chips are discussed, including chamber stationary PCR chips, flow-through PCR chips and convection PCR chips. Then we focus on droplet PCR chips and SlipChip PCR. Although they are at an early stage, they show the great potential for high-throughput PCR and robust chip. Finally, general discussions on integrated chips are given. The low cost, portable, high-throughout integrated PCR chips will certainly be further developed in spite of many challenges.

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Simulation and experimental validation of a SU-8 based PCR thermocycler chip with integrated heaters and temperature sensor

Cited by 147 publications

References 20 publications

Recent Developments in Polymer MEMS

Recent Developments in Polymer MEMS

A practical guide for the fabrication of microfluidic devices using glass and silicon

Microfluidic PCR Chips

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