Simulation for the Development of Electron Guns and Detection Systems of Modern Field Emission Scanning Electron Microscopes

Abstract

IntroductionThe latest Field Emission (FE) Scanning Electron Microscopes (SEM) have been developed to meet the increasing demands of leading-edge users for the analysis of nanomaterials. In order to achieve optimum imaging resolution and contrast, modern SEMs incorporate innovative technologies in the FE Gun, stabilized primary electron optics, and advanced multi-detector systems for selective detection of specific electron signals. Electron optics simulators are indispensable for characterizing these functions. An axially symmetric simulator is critical for designing the primary electron optics, and a three dimensional (3D) simulator is particularly helpful for engineering and optimizing the detector system. Presented here is the theoretical basis of an axially symmetric simulator with demonstrated application results. The application and utility of a 3D simulator will also be introduced.