Abstract:Hydrofluoric and phosphoric acid streams produced by the microelectronic industry usually present high flow and high contents of phosphorus, nitrogen, fluorine, and organic carbon. This study aims at evaluating the efficiency and suitability of alternative process schemes for the treatment and valorization of hydrofluoric and phosphoric acid streams. A comparative approach is followed, based on the simulation of different process schemes, each involving several steps of physicochemical and biological treatment… Show more
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