Scan path planning for on-machine inspection in a 5-axis machine tool is still a challenge to measure part geometry in a minimum amount of time with a given scanning quality. Indeed, as the laser-plane scanner takes the place of the cutting tool, the time allocated to measurement must be reduced, but not at detrimental of the quality. In this direction, this paper proposes a method for scan path planning in a 5-axis machine tool with the control of scanning overlap. This method is an adaptation of a method dedicated to a robot that has proved its efficiency for part inspection.